发明名称 |
HIGH ELECTRON MOBILITY TRANSISTOR, FIELD-EFFECT TRANSISTOR, EPITAXIAL SUBSTRATE, METHOD FOR MANUFACTURING THE SAME AND METHOD FOR MANUFACTURING GROUP III NITRIDE BASED TRANSISTOR |
摘要 |
PROBLEM TO BE SOLVED: To provide a high electron mobility transistor having a channel layer of a high purity and a buffer layer of a high resistance. SOLUTION: The high electron mobility transistor 11 comprises a support substrate 13 made of gallium nitride; a buffer layer 15 composed of a first gallium nitride based semiconductor; a channel layer 17 composed of a second gallium nitride based semiconductor; a semiconductor layer 19 composed of a third gallium nitride based semiconductor; and an electrode structure (a gate electrode 21, a source electrode 23 and a drain electrode 25) for the corresponding transistor 11. The band gap of the third gallium nitride based semiconductor is greater than the second gallium nitride based semiconductor. A carbon concentration Nc<SB>1</SB>of the first gallium nitride based semiconductor is not less than 4×10<SP>17</SP>cm<SP>-3</SP>, and the concentration N<SB>C2</SB>of the second gallium nitride based semiconductor is less than 4×10<SP>16</SP>cm<SP>-3</SP>. COPYRIGHT: (C)2007,JPO&INPIT
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申请公布号 |
JP2006332367(A) |
申请公布日期 |
2006.12.07 |
申请号 |
JP20050154406 |
申请日期 |
2005.05.26 |
申请人 |
SUMITOMO ELECTRIC IND LTD |
发明人 |
HASHIMOTO MAKOTO;KIYAMA MAKOTO;SAKURADA TAKASHI;TANABE TATSUYA;MIURA KOHEI;MIYAZAKI TOMIHITO |
分类号 |
H01L29/812;H01L21/205;H01L21/338 |
主分类号 |
H01L29/812 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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