发明名称 SLURRY SUPPLY MECHANISM OF MULTI-WIRE SAW
摘要 PROBLEM TO BE SOLVED: To obtain a slurry supply mechanism of a multi-wire saw which stably maintains slurry concentration and supplies the slurry in curtain-like uniformly over wide range without discontinuity. SOLUTION: A storage room 13 partitioned by a storage wall 12 is formed over a whole length in the lengthwise direction in a long pipe-shaped case body 11 in the row width direction of the wire row. A slurry introduction nozzle 14 introducing the slurry in the storage room 13 is mounted to the wall surface with an angle, the upper end part of the storage wall 12 has a continuous irregular shape 12a, and the clearance for discharging slurry is formed between the upper end part and the ceiling surface of the case body 11. The slurry supply mechanism is provided with a guide wall 16 for a slurry flow passage discharging the slurry to the outside by communicating with the clearance, and a jet orifice 17 is directed toward the traveling direction of the wire row. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006326756(A) 申请公布日期 2006.12.07
申请号 JP20050154205 申请日期 2005.05.26
申请人 MITSUBISHI ELECTRIC CORP 发明人 HAMAYASU MASAYUKI;ICHIMURA HIDEO;KAWASAKI TAKAFUMI;NISHIDA HIROICHI
分类号 B24B27/06;B24B57/02;B28D1/08;B28D5/04;B28D7/02;H01L21/304 主分类号 B24B27/06
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