| 摘要 |
PROBLEM TO BE SOLVED: To provide a delivery valve and a cleaning device with the delivery valve capable of delivering a contaminant generated by dust generated in a valve in opening and closing operation of the valve to the outside without mixing into a cleaning tank, capable of delivering the contaminant in the cleaning tank by leakage from the delivery valve in cleaning, and capable of efficiently delivering cleaning liquid from the cleaning tank in a short time. SOLUTION: The delivery valve is provided with a valve element 26 communicating and shutting a delivery port 2 and a delivery window 3 by abutting or separating on or from a valve seat 10 arranged in a valve body 1; and a pair of operation fluid supply ports 20 and 21 provided on the valve body 1 or on a side surface of a cylinder part 14 and communicated with a first space 18 surrounded by an upper surface of a cylinder bottom part 15, an inner peripheral surface of the cylinder part 14 and a lower surface of a piston 22, and a second space part 19 surrounded by a lower surface of a cylinder upper part 16, the inner peripheral surface of the cylinder part 14 and an upper surface of the piston 22. A plurality of grooves 26 are formed in order to communicate the delivery port 2 and the delivery window 3 when the valve element 25 and the valve seat 10 are abutted on each other. COPYRIGHT: (C)2007,JPO&INPIT
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