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发明名称
Verfahren und Apparat für verbesserte Inspektionsmessungen
摘要
申请公布号
DE69933726(D1)
申请公布日期
2006.12.07
申请号
DE19996033726
申请日期
1999.03.31
申请人
INFINEON TECHNOLOGIES AG;INTERNATIONAL BUSINESS MACHINES CORP.
发明人
GOULD, CHRISTOPHER J.;WHEELER, DONALD C.
分类号
G01B11/24;G01N21/88;G01B21/20;G01D3/028;G03F7/20
主分类号
G01B11/24
代理机构
代理人
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