| 摘要 |
<P>PROBLEM TO BE SOLVED: To form apparently planar plasma on the surface facing a workpiece in electrodes. <P>SOLUTION: Minute linear plasma is generated in an atmospheric pressure reaction container 41 filled with a process gas by using an electrode having linear conductors 51a, 52a. The planar plasma can be apparently formed by diffusing the linear plasma by adjusting the process gas or a voltage application means 44. In this way, a plasma action range to the workpiece 45 can be expanded. Soft plasma treatment can be executed to the workpiece 45 since a discharge space is located in a space different from that of the workpiece 45. It is also possible to suppress particles from depositing to the workpiece 45. <P>COPYRIGHT: (C)2007,JPO&INPIT |
