| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an observation apparatus capable of simplifying an operation for correcting aberration due to a contact prism. <P>SOLUTION: The observation apparatus comprises: a measuring instrument 90 and a template 100 which have an astigmatism-correcting optical element 61 for correcting astigmatism caused on an observation image with the contact prism 60 and a chromatic aberration-correcting optical element 70 for correcting chromatic aberration on respective observation light paths O1, O2, and measure optical information of the contact prism 60; a manual operation part 110 for inputting measurement results; a foot switch 7; a calculation processor part 133 which calculates the correction direction and correction amount of astigmatism and the correction direction and correction amount of chromatic aberration based on the inputted optical information corresponding to the operation of the foot switch 7; and an apparatus control part 131 which controls the astigmatism-correcting optical element 61, based on the calculated correction direction and correction amount of astigmatism and controls the chromatic aberration-optical element 70, based on the calculated correction direction and correction amount of chromatic aberration. <P>COPYRIGHT: (C)2007,JPO&INPIT |
