| 摘要 |
An indium deposition equipment which can form a three-dimensional thin film with an uniform thickness on a surface of a workpiece by one time deposition and allows the workpiece to transmit electromagnetic waves such that the workpiece can be used as a part for a wireless controller or radio wave sensor, and a method for coating indium on the surface of the workpiece are provided. An indium deposition equipment(1) comprises a base member(14) having a motor(10) of which a drive shaft(12) is rotated by input of a power supply; a cover body(16) which is installed on an upper portion of the base member, and on which an air vent hole(17) is formed to maintain the vacuum state in a space part(16a) within the cover body; a central shaft(18) vertically installed on an inner central part of the base member and rotated along with a drive shaft of the motor; heating means comprising electrodes(22a,22b) installed at one side of an upper part of the base member, receiving parts which are connected to the electrodes, and on which indium(2) is placed, boat type containers(24) made of molybdenum to evaporate and scatter the indium; a fixing plate(32) which is installed in an upper part of the heating part, and to which workpieces(M) are fixed; blowing fans(30) installed at both sides in an inner space of the cover body such that the blowing fans are directed toward the workpieces; and a diffusion preventing member(34) installed in an upper part of the space part(16a) to divide the space part(16a) into an upper part and a lower part.
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