| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide uniform and sufficient sterilization ability in the entire space inside a treatment chamber (2) and to prevent the cost increase of an apparatus as well by uniformizing the concentration of hydrogen peroxide inside the treatment chamber (2). <P>SOLUTION: A sterilization gas supplier (10) comprising an air compressor (11), a first path (12) connected to the air compressor (11) and the treatment chamber (2) for introducing compressed air to the treatment chamber (2), an oxygenerated water container (13) storing oxygenerated water, a second path (14) connected to the oxygenerated water container (13) and the first path (12) and an ejector (15) for introducing the oxygenerated water from the oxygenerated water container (13) to the first path (12) is installed. The compressed air containing the hydrogen peroxide is filled inside the treatment chamber (2) until the inside of the treatment chamber (2) becomes a higher pressure state than the atmospheric pressure and the entire space inside the treatment chamber (2) is sterilized. <P>COPYRIGHT: (C)2007,JPO&INPIT |
