| 摘要 |
<p>A combination interferometer (ifo) inspection device is provided which includes a Twyman-Green (T-G) ifo (80) optically coupled to a Mach-Zehnder (M-Z) ifo (82). MEMS and MOEMS versions permit substantial reduction in size and weight to permit permanently embedding an inspection device into an optical system which permits remote and automated inspection and/or adjustment of the optical system. The inspection device permits use of different coherence length light sources and receipt of an output signal from an optical system (70). The addition of the T-G ifo to the M-Z ifo aids pinhole alignment and general alignment to the optical system under test, as well as inspection with long coherence sources, while the addition of the M-Z ifo permits measurement with long or short coherence sources, allows measurement of the output beam, and permits the system to operate in a receive-only mode with an external source. The inspection device provides versatile functionality and redundancy for using a single inspection device in a variety of situations and manners in the same application.</p> |
