发明名称 FLOW INDICATOR AND APPARATUS FOR MONITORING PARTICLES IN AIR
摘要 A particle monitoring apparatus in the air and a flow rate displaying apparatus are provided to check easily the flow rate of an air sample supplied to a particle counter by using a buoy. A flow rate displaying apparatus includes a housing and a buoy. The housing(110) includes at least one lower inlet ports for absorbing a predetermined fluid, an inner space for passing the predetermined fluid, an upper exhaust port for exhausting the predetermined fluid, and a transparent window for observing the inner space. The buoy(120) is capable of moving up and down in the housing according to a flow rate of the predetermined fluid.
申请公布号 KR20060122426(A) 申请公布日期 2006.11.30
申请号 KR20050044890 申请日期 2005.05.27
申请人 发明人
分类号 H01L21/304 主分类号 H01L21/304
代理机构 代理人
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