APPARATUS FOR PROVIDING PROCESSING LIQUID FOR LIQUID CRYSTAL DISPLAY

摘要

An apparatus for supplying processing liquid of a liquid crystal display is provided to improve etching uniformity by using a supplying amount controller for controlling spraying amount of the processing liquid. A main pipe receives processing liquid from the outside. Plural sub-pipes(220) are branched from the main pipe. The sub-pipes inject the processing liquid supplied from the main pipe to a substrate(10) through plural nozzles(220a). A supplying amount controller(230) is formed at a side of the nozzle of the sub-pipe and controls spraying amount of the processing liquid. A detecting sensor(250) detects distribution state of the processing liquid injected to the substrate from the sub-pipes to transmit it to the supplying amount controller.