| 摘要 |
PROBLEM TO BE SOLVED: To coat a lipophobic agent solution, which has low viscosity and contains a highly volatile solvent, onto a very small area evenly and accurately. SOLUTION: A contact body, which comes into contact with a coating object, is housed within a sheath structure, and rigidity is imparted to the assembly including the contact body. In this state, while supplying a lipophobic agent solution to the coating object side through within the sheath structure and over the contact body per se, the surface of the coating object is traced by the contact body for coating. A coating film having a higher level of evenness can be formed by conducting double coating or repeating coating three or more times at least for a coating start point. COPYRIGHT: (C)2007,JPO&INPIT
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