METHOD AND APPARATUS FOR PREVENTING ALD REACTANTS FROM DAMAGING VACUUM PUMPS
摘要
A secondary reaction chamber (31) with a mesh reactor element (38) and a heater assembly (34) are positioned in a foreline (12) between a CVD reaction chamber (14) and a vacuum pump (16) to mix and react all previously unreacted precursor reactants to remove them from the effluent before they can reach and damage the vacuum pump.
申请公布号
WO2006127693(A2)
申请公布日期
2006.11.30
申请号
WO2006US19888
申请日期
2006.05.23
申请人
MKS INSTRUMENTS, INC.;GU, YOUFAN;NEUMEISTER, DAVID