MEMS ELEMENT AND MANUFACTURING METHOD FOR IT

摘要

PROBLEM TO BE SOLVED: To provide an MEMS element, heightening the detecting accuracy of an acceleration sensor and the operational accuracy of an actuator and a manufacturing method for it. SOLUTION: This MEMS element A includes: a substrate 1; a lower layer electrode 2 formed on the substrate 1 as a first electrode; and an upper layer electrode 3 separated from the lower layer electrode 2 and having an opposite movable part 31 as a second electrode. The movable part 31 is provided with a plurality of through holes 31a. COPYRIGHT: (C)2007,JPO&INPIT