摘要 |
PROBLEM TO BE SOLVED: To provide a reflection type laser length measuring device having a simple constitution capable of measuring the distance to a measuring object with high reliability by generating surely a self-coupling effect of laser light by removing a problem caused in the polarization direction of the laser light. SOLUTION: In this reflection type laser length measuring device, a wavelength modulated laser light is irradiated toward the measuring object from a self-coupling type laser element such as a VCSEL laser diode, and a modulated laser light generated by a self-coupling effect between a reflected laser light reflected by the measuring object and returned to the laser element and the irradiated laser light is analyzed, to thereby measure the distance to the measuring object. The device is provided especially on the measuring object with a retroreflector for reflecting the laser light, specifically a corner-cube reflector or a cat's eye reflector for acquiring reflected laser light formed by reflecting and circularly-polarizing the irradiated laser light. COPYRIGHT: (C)2007,JPO&INPIT |