Low-cost, low-voltage single-layer polycrystalline EEPROM memory cell integration into BiCMOS technology

摘要

An EEPROM memory transistor having a floating gate. The floating gate is formed using a BiCMOS process and has a first sinker dopant region proximate to a tunnel diode window, and a second sinker dopant region proximate to a coupling capacitor region. An optional third sinker region may be formed proximate to a source junction of the EEPROM memory transistor. Also, a shallow trench isolation (STI) region may be formed between the first and second sinker dopant regions.