| 发明名称 |
Combined spatial filter and relay systems in rotating compensator ellipsometer/polarimeter |
| 摘要 |
Low aberration relay systems modified to perform as spatial filters in rotating compensator ellipsometer, polarimeter and the like systems.
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| 申请公布号 |
US2006268272(A1) |
申请公布日期 |
2006.11.30 |
| 申请号 |
US20050284213 |
申请日期 |
2005.11.22 |
| 申请人 |
LIPHARDT MARTIN M;JOHS BLAINE D;HALE JEFFREY S;HERZINGER CRAIG M;GREEN STEVEN E;HE PING;WOOLLAM JOHN A |
发明人 |
LIPHARDT MARTIN M.;JOHS BLAINE D.;HALE JEFFREY S.;HERZINGER CRAIG M.;GREEN STEVEN E.;HE PING;WOOLLAM JOHN A. |
| 分类号 |
G01J4/00 |
主分类号 |
G01J4/00 |
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