发明名称 REDUCING CONTAMINATION IN OLED PROCESSING SYSTEMS
摘要 <p>A method of vaporizing organic material for deposition of an organic layer on a substrate (50) for use in making an OLED device includes providing a first vacuum chamber (10), vaporizing gettering material (40) to coat a surface which is in or to be placed in the first vacuum chamber (10) or in a second vacuum chamber, and vaporizing the organic material to deposit vaporized organic material (80) on the substrate and leaving the substrate in the first chamber or moving it to the second chamber, whereby the gettering material reacts with contaminants to lessen incorporation of contaminants into the OLED device.</p>
申请公布号 WO2006127411(A1) 申请公布日期 2006.11.30
申请号 WO2006US19309 申请日期 2006.05.17
申请人 EASTMAN KODAK COMPANY;BOROSON, MICHAEL, LOUIS;PLETEN, ANATOLE;VAN SLYKE, STEVEN, ARLAND;OTOOLE, TERRANCE, ROBERT 发明人 BOROSON, MICHAEL, LOUIS;PLETEN, ANATOLE;VAN SLYKE, STEVEN, ARLAND;OTOOLE, TERRANCE, ROBERT
分类号 C23C14/56 主分类号 C23C14/56
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