Optical element for radiation in the EUV and/or soft X-ray wavelength range and an optical system comprising at least one optical element
摘要
<p>An optical element (1) has a substrate (2) with a multi-layer coating (3) applied to the substrate, and with an outer surface (5) facing the incident radiation and having an optically-active zone (6). A capacitor comprises first- and second-electrodes, in which at least one layer of the multi-layer coating (3) serves as the first capacitor electrode (25), and in which between the first- and second-capacitor electrodes (26) is provided at least one dielectric layer. An independent claim is included for an optical system.</p>
