发明名称 METHOD FOR DEPOSITION OF TITANIUM OXIDE BY A PLASMA SOURCE
摘要 The invention relates to a method for deposition of a coating of titanium oxide on a substrate, characterised in that the coating, with photochemical properties, is deposited chemically in the gas phase, in particular, from a gas mixture comprising at least one organometallic precursor and/or a metallic halide of said metallic oxide, the deposition being assisted by a plasma source.
申请公布号 KR20060121660(A) 申请公布日期 2006.11.29
申请号 KR20057025270 申请日期 2005.12.29
申请人 SAINT-GOBAIN GLASS FRANCE 发明人 DURANDEAU ANNE;DURAN MAXIME;VICTOR CORINNE
分类号 C23C16/40 主分类号 C23C16/40
代理机构 代理人
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