| 摘要 |
A MEMS device achieves a large angle of rotation of a plate about 2 independent axes by employing a handle portion of the plate which is isolated by respective springs coupling the handle portion to each of two actuators. A first actuator, which rotates the mirror about the same axis as done in U.S. Pat. No. 6,781,744 is essentially the same structure disclosed therein, but with the mirror plate thereof shrunken in size. This shrunken plate is coupled by a spring to the mirror plate of the instant invention. Movement of the shrunken plate causes corresponding movement of the handle portion, and hence the mirror. A second actuator, coupled by another spring to the mirror plate of the instant invention, rotates about a second axis that is perpendicular to the first axis and parallel to the substrate. The second actuator includes an actuator plate and an electrode thereunder.
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