DIAGNOSIS METHOD AND REPAIR METHOD OF PROBLEM OF LASER DEVICE

摘要

A problem diagnosis method for a laser device, which shortens the time required for repairing work such as inspection and repair of the laser device by early discovering problems such as breakdown of the laser device at an early stage, and a problem repair method for a laser device, which reduces the repair cost by repairing breakdown or deterioration of parts discovered by the problem diagnosis method without a contact with a repair worker, are provided. A problem diagnosis method for a laser device comprises the processes of: measuring the intensity of scattered light generated from an optical component in the laser device; referring to data indicating a relationship between the intensity of scattered light under predetermined operating conditions of the laser device and a seriousness degree of the problem of the optical component to predict the seriousness degree of the problem from the intensity of scattered light; and determining whether a repair work is necessary or not based on the seriousness degree of the problem. A problem repair method for a laser device comprises the processes of: measuring the intensity of scattered light generated from an optical component in the laser device; referring to data indicating a relationship between the intensity of scattered light under predetermined operating conditions of the laser device and a seriousness degree of the problem of the optical component to predict the seriousness degree of the problem from the intensity of scattered light; determining whether a repair work is necessary or not based on the seriousness degree of the problem; and moving the optical component so that a position on which the laser beam irradiates is changed on the optical component in which the problem occurred when the repair work is determined to be necessary.