摘要 |
<P>PROBLEM TO BE SOLVED: To obtain a substrate for forming a single crystal thin film composed mainly of gallium nitride, indium nitride or aluminum nitride, which consists of a sintered compact composed mainly of a ceramic material, and to obtain a thin-film substrate with the single crystal thin film formed thereon, and an electronic element such as a light emitting element having excellent luminous efficiency. <P>SOLUTION: The sintered compact composed mainly of a ceramic material, especially translucent sintered compact is used as the substrate to form a highly crystalline single crystal thin film composed mainly of at least one or more kinds selected from among gallium nitride, indium nitride and aluminum nitride, on the substrate. Thus, a thin-film substrate with the highly crystalline single crystal thin film formed thereon is provided. Further, an electronic element such as a light emitting element excellent in luminous efficiency is provided by using the sintered compact composed mainly of a ceramic material. <P>COPYRIGHT: (C)2007,JPO&INPIT |