| 摘要 |
PROBLEM TO BE SOLVED: To perform inspection in which wrong determination of missing codes is few, without increasing the input digital data amount, and inspection time, when the existence of a missing code of an A/D converter included in an element to be inspected is inspected using differential nonlinear error (abbreviated as "DNL", hereafter). SOLUTION: Lamp waves for inspection are input in multiple times to the element to be inspected, the appearance number of each code is counted by using data returned from the element to be inspected, DNL with an absolute value of each code is obtained from an averaged value of them by the input times; and at the same time, the DNL with the absolute value of each code is respectively obtained from the individual ramp wave. Then the least value is selected out of them and is set as the DNL with the absolute value of each code. Next, the DNL, with the absolute value of each code obtained from the two method, are respectively compared, and the smaller of the values is set as the DNL with the absolute value of the code. COPYRIGHT: (C)2007,JPO&INPIT
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