| 摘要 |
PROBLEM TO BE SOLVED: To provide a load sensor for incorrect operation and operation incapability by suppressing a settling phenomenon of an insulating film of the load sensor and always surely carrying out sensing operation suitable for a state of load burden. SOLUTION: The load sensor comprises a flexible insulating spacer 10 having a cell hole 11; first and second flexible insulating films 12 and 13 arranged mutually in substantially parallel by being superposed on both the faces of the spacer 10 respectively; a plurality of first and second cell electrodes 7a and 7b provided on each inner face of the first and second films by being oppositely arranged in each cell hole in order to sense a load state from the outside; and a circuit wiring layers 8a and 8b formed on at least one of the first and second films. At least one cell electrode of the first and second cell electrodes has pressure sensitive resistant layers 7a2 and 7b2 on the surface. The pressure sensitive resistant layer has projections 7a3 and 7b3 projected toward the other opposite cell electrode. COPYRIGHT: (C)2007,JPO&INPIT
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