| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an apparatus for laser beam machining, which apparatus can quickly correct the error of a position to be irradiated by a laser beam on the surface of a workpiece owing to the positional shift of a stage. <P>SOLUTION: The apparatus for laser beam machining comprises a laser beam source 1, a fine adjustment stage 11 which holds the workpiece 5 having a machining surface to be irradiated by the laser beam radiated from the laser beam source, and displaces the position on the machining surface to be irradiated by the laser beam by moving the workpiece in the direction parallel to the machining surface, a stage 6 which holds the fine adjustment stage and moves the fine adjustment stage at least in the one dimensional direction parallel to the machining surface of the workpiece held on the fine adjustment stage, a position detector 8 for detecting the position of the workpiece 5 held by the stage 6 or the fine adjustment stage 11, and a control unit 9 for controlling the fine adjustment stage so as to move the workpiece toward a target position based on the positional shift from the target position of the workpiece held by the stage or the fine adjustment stage. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
