| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of an electrostatic actuator that does not generate cracks and breakage to a silicon substrate during manufacturing, and does not cause a thinned diaphragm and an electrode takeout to be cracked. SOLUTION: The manufacturing method of the electrostatic actuator comprises a process that forms an electrode recess 10a for forming an electrode 11 on a glass substrate 2a, and forms the electrode 11 in the electrode recess 10a; a process that film-forms a getter material 31 in a recess 30 that becomes a getter chamber by forming the recess 30 of the getter chamber, for accommodating the getter material 31 that communicates with the electrode recess 10a and adsorbs gas in the electrode recess 10a on the glass substrate 2a; a process that thins the silicon substrate 1a after cathode-joining the silicon substrate 1a to the glass substrate 2a; and a process that separates the electrode recess 10a and the getter chamber by using sealing material 22, by sealing the electrode recess 10a by using the sealing material. COPYRIGHT: (C)2007,JPO&INPIT
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