| 摘要 |
PROBLEM TO BE SOLVED: To disclose a method and a system for inspecting a plurality of electronic devices formed on a large-area substrate. SOLUTION: In this system of one example of implementation, inspections is performed on the substrate along one linear axis in at least one chamber, slightly wider than the size of the substrate to be inspected. The space of a clean room and a processing time period are minimized by the smaller size and capacity of the system. COPYRIGHT: (C)2007,JPO&INPIT |
