| 摘要 |
PROBLEM TO BE SOLVED: To provide a displacement measurement method of a profile measurement of a displacement quantity measurement or the like at a surface of an object to be measured like a sample or the like with a simple constitution and speed, a displacement measurement device, and to provide an X-ray analysis method and an X-ray analysis device conducting the X-ray analysis of the sample with a high accuracy and speed. SOLUTION: The displacement measurement method comprises a step measuring the surface displacement which receives a reflected beam from the surface, by irradiating a line laser beam from the line laser beam irradiation part 1 on the surface 2a of the object to be measured 2, and a step rotating relatively the object to be measured and the line laser beam irradiation part. The high accuracy measurement can be done in a short time, by conducting the measurement covering a wider region than the line laser beam repeating the displacement measurement and the rotation. Or, the displacement measurement is performed by the relative rotation continuously. COPYRIGHT: (C)2007,JPO&INPIT
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