发明名称 METHOD FOR THE MANUFACTURE OF A NON-VOLATILE FERROELECTRIC MEMORY DEVICE AND MEMORY DEVICE THOUS OBTAINED
摘要 The present invention relates to non- volatile ferroelectric memory devices (30) comprising a transistor (22) and a capacitor (23), and more particularly to non-volatile electrically erasable programmable ferroelectric memory elements, and a method for processing such non-volatile ferroelectric memory devices (30). The method according to the invention comprises a limited number of mask steps because a gate dielectric layer of the transistor (22) and a dielectric layer of the capacitor (23) are made from the same organic or inorganic ferroelectric layer (14).
申请公布号 KR20060120220(A) 申请公布日期 2006.11.24
申请号 KR20067012474 申请日期 2006.06.22
申请人 KONINKLIJKE PHILIPS ELECTRONICS N.V. 发明人 MARSMAN ALBERT W.;DE LEEUW DAGOBERT M.;GELINCK GERWIN H.
分类号 H01L27/105;H01L21/02;H01L21/312;H01L21/316;H01L21/77;H01L21/8239;H01L21/8246;H01L21/84;H01L27/115;H01L27/12;H01L27/13;H01L51/00;H01L51/05;H01L51/30 主分类号 H01L27/105
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