| 摘要 |
PROBLEM TO BE SOLVED: To realize a Zener diode which has a breakdown voltage that is kept high and stable and is small in chip size. SOLUTION: Zener diodes each include a pn junction composed of an n-layer 2 and a p-layer 4, each provided with a back electrode 6 electrically connected to the n-layer 2, and each provided with a surface electrode 5 electrically connected to the p-layer 4. A first, a second, a third and a fourth semiconductor wafer, W1 to W4 are prepared where the Zener diodes are provided, the surface electrodes 5 and the back electrodes 6 are positioned to each other, the semiconductor wafers W1 to W4 are stuck together, and then the semiconductor wafers are cut into separate chips, whereby a laminated Zener diodes ZD1 can be formed where four Zener diodes are stacked up in a longitudinal direction. COPYRIGHT: (C)2007,JPO&INPIT |
