| 摘要 |
PROBLEM TO BE SOLVED: To realize a high storage efficiency while enabling a random access to a substrate to be transferred. SOLUTION: This substrate transfer system comprises a substrate storage cassette having a loading surface on which the substrate is placed and a plurality of rack parts disposed through predetermined spaces in the vertical direction and a transfer cassette for carrying out the substrate from the substrate storage cassette. An air jetting means jetting air between the substrate to be carried out and the loading surface on which the substrate is placed from the sides of the substrate in the roughly horizontal direction is provided. COPYRIGHT: (C)2007,JPO&INPIT
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