| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a means for preventing collisions between tables, even if unexpected situations, such as a control software error and a power supply failure, occur, when the tables are exchanged between different working zones, in a lithographic apparatus which has a plurality of the tables in which a mask or a substrate is mounted. <P>SOLUTION: In the collision prevention means, physical hazard objects 190, 170, 180 and 200 are provided labyrinthically along a path in which substrate tables WTa and WTb are moved from a working zone 20 to a working zone 30 or vice versa so that only correct path can be passed through. In the exchange process, the tables are combined with shuttles CS1 and CS2, respectively, and these shuttles are linked by a chain and the like so that both tables can only be moved together, thereby preventing collisions. <P>COPYRIGHT: (C)2007,JPO&INPIT |
