| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a droplet discharging apparatus having improved controllability of the geometry of a pattern through control of the shape of droplets deposited with different timing, a pattern forming method, a method of manufacturing an electro-optical apparatus and the electro-optical apparatus obtained thereby. <P>SOLUTION: The edge part of a subsequent upper-layer liquid film 26L2 is laminated on the edge part of a previously formed lower-layer liquid film 26L1, and the laminated area in which the lower-layer film 26L1 and the upper-layer film 26L2 are superimposed is irradiated with a laser beam B capable of fluidizing the oriented film forming liquid. The beam spot of the laser beam B is scanned from the raised FDT side, or the upper-layer liquid film 26L2 side, to the recessed FDB side, or the lower-layer liquid film 26L1 side, through rotation driving of a polygon mirror 48. <P>COPYRIGHT: (C)2007,JPO&INPIT |
