发明名称 |
System and apparatus for supplying carbon dioxide to a semiconductor application |
摘要 |
A system and apparatus for the delivery of a high purity carbon dioxide fluid is provided. The system includes at least two separate semiconductor applications, wherein one of said applications requires refrigeration. A first portion of the carbon dioxide stream is drawn off the supply line and directing it to a first semiconductor application. A second portion is drawn off the supply line and routed to a second semiconductor application across a pressure-reduction device thereby reducing the temperature and pressure of the second gas, entering the second semiconductor application.
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申请公布号 |
US2006260657(A1) |
申请公布日期 |
2006.11.23 |
申请号 |
US20050131220 |
申请日期 |
2005.05.18 |
申请人 |
JIBB RICHARD J;KELLY RICHARD M;BILLINGHAM JOHN F;BERGMAN THOMAS J JR |
发明人 |
JIBB RICHARD J.;KELLY RICHARD M.;BILLINGHAM JOHN F.;BERGMAN THOMAS J.JR. |
分类号 |
B08B3/02 |
主分类号 |
B08B3/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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