Fluorine-containing compounds and their polymers useful for anti-relfection film materials and resist compositions

摘要

The invention relates to a fluorine-containing compound represented by the formula 1, where R¹ is a methyl group or trifluoromethyl group, each of R² and R³ is independently a hydrogen atom or a group containing (a) a hydrocarbon group having a straight-chain, branched or ring form and having a carbon atom number of 1-25 or (b) an aromatic hydrocarbon group, the group optionally containing at least one of a fluorine atom, an oxygen atom and a carbonyl bond, 1 is an integer of from 0 to 2, each of m and n is independently an integer of 1-5 to satisfy an expression of m+n<=6, and when at least one of R¹, R² and R³ is in a plural number, the at least one of R¹, R² and R³ may be identical with or different from each other.