| 摘要 |
A manufacturing method of a humidity sensor having a moisture-sensitive film formed of a polymer membrane is disclosed. The method involves performing a first heat treatment process in which the polymer membrane is heat treated at a temperature that is at least approximately equal to a glass transition temperature of the polymer membrane. The method also involves performing a second heat treatment process in which the polymer membrane is heat treated at a temperature that is at most approximately equal to the glass transition temperature of the polymer membrane in a predetermined ambient humidity.
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