CONTROLLED POLARITY GROUP III-NITRIDE FILMS AND METHODS OF PREPARING SUCH FILMS
摘要
The present invention provides methods of preparing Group III-nitride films of controlled polarity and substrates coated with such controlled polarity films. In particular, the invention provides substrate preparation steps that optimize the substrate surface for facilitating growth of a Group III-polar film, an N-polar film, or a selectively patterned film with both a Group III-polar portion and an N-polar portion in precise positioning. The methods of the invention are particularly suited for use in CVD methods.
申请公布号
WO2006124067(A1)
申请公布日期
2006.11.23
申请号
WO2005US43073
申请日期
2005.11.29
申请人
NORTH CAROLINA STATE UNIVERSITY;COLLAZO, RAMON, R.;SITAR, ZLATKO;SCHLESSER, RAOUL