Manufacturing method for integrated sensor arrays,申请号EP20000850013-传众专利搜索

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发明名称	Manufacturing method for integrated sensor arrays
摘要
申请公布号	EP1022561(B1)	申请公布日期	2006.11.22
申请号	EP20000850013	申请日期	2000.01.24
申请人	APPLIEDSENSOR SWEDEN AB	发明人	FAEGERMAN, PER-ERIK
分类号	G01N27/414;G03F7/00;H01L21/00	主分类号	G01N27/414
代理机构		代理人
主权项
地址

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