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发明名称
Reflective projection lens for EUV photolithography
摘要
申请公布号
EP1282011(B1)
申请公布日期
2006.11.22
申请号
EP20020016693
申请日期
2002.07.26
申请人
CARL ZEISS SMT AG
发明人
MANN, HANS-JUERGEN;ULRICH, WILHELM;HUDYMA, RUSSEL M.
分类号
G02B17/00;G03F7/20;G02B17/06;G02B27/18;H01L21/027
主分类号
G02B17/00
代理机构
代理人
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