,申请号JP20010183702-传众专利搜索

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发明名称
摘要
申请公布号	JP3849072(B2)	申请公布日期	2006.11.22
申请号	JP20010183702	申请日期	2001.06.18
申请人		发明人
分类号	G01B5/20;H01L21/00	主分类号	G01B5/20
代理机构		代理人
主权项
地址

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