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发明名称
Multiple-layered ceramic heater
摘要
申请公布号
EP0964433(B1)
申请公布日期
2006.11.22
申请号
EP19990110959
申请日期
1999.06.08
申请人
SHIN-ETSU CHEMICAL CO., LTD.
发明人
KANO, SHOJI;IWAI, RYOUJI;ITO, KENJI
分类号
H01L21/00;H05B3/20;H01L21/205;H01L21/302;H01L21/3065;H05B3/28
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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