发明名称 Method for fabricating a magnetic transducer with a corrosion resistant layer on metallic thin films by nitrogen exposure
摘要 A process is described for fabricating magnetic transducers with metallic thin films with a corrosion resistant surface produced by exposing the thin films to a nitrogen in a plasma chamber. The exposure to the nitrogen is believed to increase the corrosion resistance of the metallic thin films by causing nitrides to form in a thin surface region. In the preferred embodiment the thin film metals of a magnetic transducer are treated with the nitrogen after being cut from the wafer and lapped. Typical metals used in magnetic transducers are NiMn, FeMn, NiFe, cobalt, CoFe, copper, IrMn and PtMn. The films may be further protected by the addition of prior art protective layers such as carbon.
申请公布号 US7137190(B2) 申请公布日期 2006.11.21
申请号 US20020264663 申请日期 2002.10.03
申请人 HITACHI GLOBAL STORAGE TECHNOLOGIES NETHERLANDS B.V. 发明人 HSIAO YIPING;HWANG CHERNGYE;TABIB JILA
分类号 G11B5/127;G11B5/10;G11B5/187;G11B5/31;G11B5/39;G11B5/40;H01R31/00 主分类号 G11B5/127
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