| 发明名称 |
Bridged carbocyclic compounds and methods of making and using same |
| 摘要 |
Disclosed herein is a fluorinated bridged carbocyclic compound that can be polymerized by itself or with at least one other ethylenically unsaturated monomer to provide a polymer. The polymer may be used, for example, within a sub-300 nm photoresist composition. Also disclosed is a method to make the bridged carbocyclic compound.
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| 申请公布号 |
US7138550(B2) |
申请公布日期 |
2006.11.21 |
| 申请号 |
US20040784377 |
申请日期 |
2004.02.23 |
| 申请人 |
AIR PRODUCTS AND CHEMICALS, INC. |
发明人 |
CARR RICHARD VAN COURT;MARKLEY THOMAS JOHN;ABDOURAZAK ATTEYE HOUSSEIN;MARSELLA JOHN ANTHONY |
| 分类号 |
C07C43/18;C07C31/38;C07C31/42;C07C41/01;C07C43/188;C07C43/196;C07D309/10;C07D309/12;G03C1/492;G03F7/004;G03F7/039;H01L21/027 |
主分类号 |
C07C43/18 |
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