| 摘要 |
FIELD: measuring technique. ^ SUBSTANCE: device has measuring unit which has prod, platform with through opening where measuring unit is installed. Prod is capable of touching surface to be measured and of moving at plane being perpendicular to measured surface and along direction of measurement. Platform is provided with three supports for installation. As measuring unit the linear shift detector is used, which detector has light source, illuminating two diffraction gratings. One of gratings is measuring, being tightly connected with prod, and the other one is additional grating. Detector also has photoreceivers. Supports are made of materials having low temperature expansion coefficient. Supports provide three-point installation of platform onto surface; they are disposed in vertexes of triangle in such a way that one catheter of triangle is parallel to one side of platform. ^ EFFECT: improved precision of measurement; reduced limitations in size of surface to be measured; accelerated measuring process; widened working temperature range. ^ 4 dwg |
