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发明名称
CHEMICAL MECHANICAL POLISHING PAD HAVING HOLES AND/OR GROOVES
摘要
申请公布号
KR100646702(B1)
申请公布日期
2006.11.17
申请号
KR20010049355
申请日期
2001.08.16
申请人
发明人
分类号
B24B37/00;H01L21/304;B24B37/04;B24D13/14;H01L21/306
主分类号
B24B37/00
代理机构
代理人
主权项
地址
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