| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for production of a ceramic substrate which has less distortion such as warpage or wave undulation, hardly causes the displacement of each layer laminated to be arranged and thus is excellent in dimensional accuracy. <P>SOLUTION: The production method for the ceramic substrate comprises firing the primarily fired substrate which is obtained by firing an unfired one in such a state as being pinched and pressed in a thickness direction to obtain a secondarily fired substrate in which the distortion on the primarily fired substrate is corrected, arranging an electrode material in layers on the surface of the resultant secondarily fired substrate and firing to form an electrode layer. Further, the method includes heat-treating the secondarily fired substrate at a firing temperature or higher than that in the formation of the electrode layer before arranging the electrode material. <P>COPYRIGHT: (C)2007,JPO&INPIT |
