发明名称 |
Method of Automatically Creating a Semiconductor Processing Prober Device File |
摘要 |
Described is a method for automatically generating a wafer prober file whereby testing parameters and die identities can be established for testing a complete semiconductor wafer and whereby acceptable or rejected dies can be identified and correlated later with where the good or bad dies are physically located on a wafer-under-test.
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申请公布号 |
US2006255824(A1) |
申请公布日期 |
2006.11.16 |
申请号 |
US20050908537 |
申请日期 |
2005.05.16 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
LIAO KEVIN;CHEN EDWARD;HUNG WIN;CHUANG JUMBO;HSU CHANG-CHI;LIU CHIA-PING;HSIAO CHUN-CHIEH |
分类号 |
G01R31/26;G01N37/00 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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