发明名称 Method of Automatically Creating a Semiconductor Processing Prober Device File
摘要 Described is a method for automatically generating a wafer prober file whereby testing parameters and die identities can be established for testing a complete semiconductor wafer and whereby acceptable or rejected dies can be identified and correlated later with where the good or bad dies are physically located on a wafer-under-test.
申请公布号 US2006255824(A1) 申请公布日期 2006.11.16
申请号 US20050908537 申请日期 2005.05.16
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 LIAO KEVIN;CHEN EDWARD;HUNG WIN;CHUANG JUMBO;HSU CHANG-CHI;LIU CHIA-PING;HSIAO CHUN-CHIEH
分类号 G01R31/26;G01N37/00 主分类号 G01R31/26
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