PROCESSED OBJECT RETAINER, SUSCEPTOR FOR SEMICONDUCTOR MANUFACTURING APPARATUS, AND PROCESSOR

摘要

PROBLEM TO BE SOLVED: To provide a low cost and highly reliable processed object retainer by preventing the occurrence of damage due to oxygen in the atmosphere; and to provide a susceptor for a semiconductor manufacturing apparatus having this processed object retainer, and a processor comprising this processed object retainer.

SOLUTION: This retainer 1 comprises a ceramic substrate 2 for retaining a processed object having an electrode 4 and a heater circuit 5, a cylindrical member 6 having one end thereof connected to the ceramic substrate 2, a sealing member 11 located inside the cylindrical member 6 for separating the cylindrical member into the one end side and the other end side positioned oppositely to the one end side in the cylindrical member 6, and terminal side electrode lines 8 extended from the other end side to the one end side through the sealing member 11 inside the cylindrical member 6 and electrically connected to the electrode 4 and the heater circuit 5.

COPYRIGHT: (C)2007,JPO&INPIT