| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device and method enabling accurate inspection, and a method of manufacturing a pattern substrate using them. SOLUTION: This inspection device is equipped with a polygon mirror 5 having a rotary reflecting surface for reflecting a light beam from a light source 1, for scanning the light beam by rotating the propagation axis of an outgoing beam together with the time; a collimator optical system 7 having a spherical surface concave mirror 8 and a correction lens 9, for changing the outgoing beam emitted from the polygon mirror 5 into a light beam parallel to the optical axis, whose distance from the optical axis is changed together with the time; a cylindrical lens 21 provided along the scanning direction of the light beam, for collecting scattered light scattered by a sample 10; a bundle fiber 23 arranged so that the scattered light emitted from the cylindrical lens 21 enters; and a PMT 24 for detecting the scattered light emitted from the bundle fiber 23. COPYRIGHT: (C)2007,JPO&INPIT
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